{"id":963,"date":"2021-03-11T13:59:00","date_gmt":"2021-03-11T12:59:00","guid":{"rendered":"http:\/\/prokon-elektronika.pl\/katalog\/uncategorized\/evg610-system-centrowania-masek\/"},"modified":"2021-03-23T15:26:34","modified_gmt":"2021-03-23T14:26:34","slug":"evg610-mask-alignment-system","status":"publish","type":"product","link":"https:\/\/prokon-elektronika.pl\/en\/katalog\/devices-for-photolithography\/evg610-mask-alignment-system\/","title":{"rendered":"EVG610 Mask alignment system"},"content":{"rendered":"<p><span style=\"font-weight: 400;\">The EVG<\/span><span style=\"font-weight: 400;\">?<\/span><span style=\"font-weight: 400;\">610 is a compact and multi-purpose R&amp;D system that can handle small substrate pieces and wafers up to 200 mm.<\/span><\/p>\n<p><span style=\"font-weight: 400;\">Stand-alone system for wafer sizes up to 100 mm \/ 150 mm \/ 200 mm\u00a0<\/span><\/p>\n<p><span style=\"font-weight: 400;\">Top-side \/ bottom-side alignment down to ? 0.5 ?m \/ ? 1.0 ?m\u00a0<\/span><\/p>\n<p><span style=\"font-weight: 400;\">High-resolution top- and bottom-side splitfield microscopes for double-side alignment\u00a0<\/span><\/p>\n<p><span style=\"font-weight: 400;\">Soft-, hard-, vacuum contact and proximity exposure\u00a0<\/span><\/p>\n<p><span style=\"font-weight: 400;\">Automated wedge compensation\u00a0<\/span><\/p>\n<p><span style=\"font-weight: 400;\">Bond Alignment and NIL option\u00a0<\/span><\/p>\n<p><span style=\"font-weight: 400;\">Supports the latest UV-LED technology<\/span><\/p>\n","protected":false},"excerpt":{"rendered":"<p><span style=\"font-weight: 400;\">The EVG<\/span><span style=\"font-weight: 400;\">?<\/span><span style=\"font-weight: 400;\">610 is a compact and multi-purpose R&amp;D system that can handle small substrate pieces and wafers up to 200 mm.<\/span><\/p>\n","protected":false},"featured_media":812,"template":"","meta":[],"class_list":["post-963","product","type-product","status-publish","has-post-thumbnail","hentry","product_cat-devices-for-photolithography","product_cat-nanoimprint-devices","product_tag-nanotechnology","product_tag-semiconductor-electronics","pa_producent-evgroup-en"],"_links":{"self":[{"href":"https:\/\/prokon-elektronika.pl\/en\/wp-json\/wp\/v2\/product\/963","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/prokon-elektronika.pl\/en\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/prokon-elektronika.pl\/en\/wp-json\/wp\/v2\/types\/product"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/prokon-elektronika.pl\/en\/wp-json\/wp\/v2\/media\/812"}],"wp:attachment":[{"href":"https:\/\/prokon-elektronika.pl\/en\/wp-json\/wp\/v2\/media?parent=963"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}