{"id":966,"date":"2021-03-11T13:56:41","date_gmt":"2021-03-11T12:56:41","guid":{"rendered":"http:\/\/prokon-elektronika.pl\/katalog\/uncategorized\/evg301-myjka-do-mycia-pojedynczych-plytek-krzemowych\/"},"modified":"2021-03-23T15:28:22","modified_gmt":"2021-03-23T14:28:22","slug":"evg301-single-wafer-cleaning-system","status":"publish","type":"product","link":"https:\/\/prokon-elektronika.pl\/en\/katalog\/wafer-cleaners\/evg301-single-wafer-cleaning-system\/","title":{"rendered":"EVG301 Single wafer cleaning system"},"content":{"rendered":"<p><span style=\"font-weight: 400;\">R&amp;D type single wafer cleaning system<\/span><\/p>\n<p><span style=\"font-weight: 400;\">The EVG301 semi-automated single wafer cleaning system employs one cleaning station, which cleans wafers using standard DI-water rinse as well as megasonic, brush and diluted chemicals as additional cleaning options. With manual loading and pre-alignment, the EVG301 is a versatile R&amp;D-type system for flexible cleaning procedures and 300 mm capability. The EVG301 system can be combined with EVG&#8217;s wafer alignment and bonding systems to eliminate any particle prior to wafer bonding. Spinner chucks are available for different wafer and substrate sizes to allow easy setup for different processes.<\/span><\/p>\n","protected":false},"excerpt":{"rendered":"<p><span style=\"font-weight: 400;\">R&amp;D type single wafer cleaning system<\/span><\/p>\n","protected":false},"featured_media":804,"template":"","meta":[],"class_list":["post-966","product","type-product","status-publish","has-post-thumbnail","hentry","product_cat-wafer-cleaners","product_tag-nanotechnology","product_tag-semiconductor-electronics","pa_producent-evgroup-en"],"_links":{"self":[{"href":"https:\/\/prokon-elektronika.pl\/en\/wp-json\/wp\/v2\/product\/966","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/prokon-elektronika.pl\/en\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/prokon-elektronika.pl\/en\/wp-json\/wp\/v2\/types\/product"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/prokon-elektronika.pl\/en\/wp-json\/wp\/v2\/media\/804"}],"wp:attachment":[{"href":"https:\/\/prokon-elektronika.pl\/en\/wp-json\/wp\/v2\/media?parent=966"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}