Diffusion tube furnace BDF 41 with 4 tubes for silicon substrates with a diameter of: 100 to 200 mm
\nProven reliability, state-of-the-art thermal technology, precision loading, superior, throughput performance, reduced cost-of-ownership.
\nStandard Configuration below (options are available).
\nSupervisory Software: APEX
\nTube-independent, furnace controls
\nLoad station: Horizontal Laminar Flow (Class 10)
\nTemperature range: 400C to 1325C; 5 Zone Elements with 1m Flat Zone; Spike & Profile TC Control with +\/-0.5 degree control and auto profiling capability.
\nExhaust: Scavenger (Individual), Furnace (Water-Cooled) and Source Cabinet (General)
\nSource Cabinet: L-Shaped Layout with Separate Tube Foyer and Gases;
\nVertically-Mounted Gas Panels<\/p>\n","protected":false},"excerpt":{"rendered":"
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