Combining an ion microscope with precise, easy, and efficient milling

The VELION FIB-SEM system  enables FIB imaging to be performed with various ion species including Lithium. Due to its unique setup with a vertically mounted FIB column, the ion beam of either Lithium, Gallium, or Bismuth is always perpendicular to the sample surface. IONselect  offers the ability to change ions reliable and quickly without sample tilt.
In this way, the sample can be milled and imaged at highest precision and accuracy. Bismuth, Gallium, and Lithium beams can be switched instantly and automatically, and are subsequently applied to the sample either for milling with heavy bismuth or gallium ions, or for light-ion microscopy with lithium. 3D nanoscale tomography becomes possible at unrivaled stability and fidelity.
Depth resolution and surface smoothness can be designed by choosing from gallium or bismuth ions or Bi cluster for milling. On top of that, the precision of the laser interferometer stage enables the imaging of each layer at the exact same position. That way a highly accurate stacking of the single images and therefore the creation of high-precision 3D models of the sample is possible
A workflow alternately using bismuth ions for fast sample delayering and lithium for imaging can be combined with the precision of a laser interferometer stage to result in a powerful ion microscope for 3D imaging.
Taking advantage of a lithography platform for ion microscopy
The VELION FIB-SEM system is based on Raith lithography equipment with a lithography platform matured over decades. In addition to the specific architecture and the advantages that derive from the use of a laser interferometer stage, VELION’s smart patterning strategies guarantee homogenous milling of the sample, regardless of the sample requirements.
For more information about the VELION FIB-SEM system with ion microscopy capabilities, visit the VELION product site.