Velion, Raith product. FIB-centric nanofabrication. Four modes. Two beams. One system.
VELION is a novel FIB-SEM instrument in which FIB nanofabrication has matured into the standard technique for fabricating three dimensional and high resolution nanostructures, such as plasmonic devices, nano-fluidics, localized implantation and functionalization.
VELION enables:
- Direct and versatile FIB patterning for simplified, flexible, 3D, and automated processing
- Highest-precision nanofabrication over extended areas and periods of time
- SEM imaging for in-situ process control, inspection and sample preparation.
Four different operation modes are possible in the unique FIB-centric setup, supported by a tailored FE-SEM column and a high-precision laser interferometer stage.
FIB Nanofabrication
Benefit from achieving results faster by eliminating time-consuming and yield-limiting steps in the lithography-process like etching of new and challenging materials. Direct milling and etching are possible for the creation of 3D structures, even on topographic samples and distributed over large areas.
Sample Preparation
Prepare your TEM samples with FIB milling and SEM live control in-situ.
Process control
Check your process development and results in-situ. With advanced stage setups, high-resolution SEM, and automated metrology, process control can be performed directly for fast parameter optimization..
E-Beam Lithography
Exploit the unlimited opportunities of combined FIB and SEM in a single tool. EBL applications are also possible thanks to features including sophisticated parameter control, automatic scans, and proximity effect correction.
I invite you to visit the manufacturer’s website https://www.raith.com/velion.html