PicoMaster 200 UV direct laser writer for maskless lithography
Producer:
Raith GmbH
Application:
Nanotechnology
Semiconductor electronics
Category:
Devices for maskless lithography
Description:
Highest resolution in the market utilizing a 405 nmdiode laser
For substrates from 5x5mm2 up to 8?x8?
For more demanding applications a 375 nm laser is optional
High quality tool & high quality output
Minimal maintenance costs
Compact optical module: use a spare optical module for revolutionary machine downtime reduction
User-friendly operation
The PicoMaster is a versatile UV laser writer with ultra-high precision components, specifically designed to give the user the highest degree of freedom to create micro structures in photo sensitive layers. The PicoMaster 200 is a standalone system. All components are enclosed, including control rack, vacuum pump and control PC. This allows for quick and easy installation.Can be extended with an auto-loader and coating line to optimize machine utilization. A touch screen for operating the machine is attached to the frame. The system includes a 405 nm optical module capable of writing structures as small as 300 nm in photo resist layers. This user friendly tool supports up to 4095 levels of grayscale or pure binary mode and allows for 3D optical structures, surface structures as well as mask projects. Real time laser controlled auto focus and laser intensity control ensure high quality imaging during the entire exposure process.
The PicoMasterProject Manager software is included in the package and can be freely installed on any Windows based PC.
When connected to an air conditioning unit to supply conditioned air, a built-in Hepa filter creates a clean cross flow.
The massive base frame supported by isolation mounts filters out ground frequencies to ensure minimum vibrations in the system.
PicoMaster 200: the ideal Litho tool for R&D.
Applications
-Research / Semiconductor
-Photonic devices
-Mask making
-3D Lithography
-Diffractive optical elements
-Microfluidics
-Security / Holographics
-Other