Description:

Fast, smart, innovative and economical 

VOYAGER ? a new class of Electron Beam Lithography technology 

VOYAGERTM is recommended for all industrial and academic Electron Beam Lithography applications where the important objectives are high write throughput and maximum resolution. As well as the newly developed, innovative eWRITE system architecture, Raith attaches great importance to an attractive price/performance ratio throughout the lifetime of the system. 

The hardware and software have been consistently designed for automated exposure operations. The state-of-the-art high-performance pattern generator and electron optics have been optimally aligned. 

Samples of up to 8 inches are exposed at high speed. The necessary system stability is ensured, even in difficult environments, by a thermally stabilized and environmentally tolerant housing.