Nanoimprint devices
Product catalog by category - Nanoimprint devices
2 products
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EVG610 Mask alignment system
The EVG?610 is a compact and multi-purpose R&D system that can handle small substrate pieces and wafers up to 200 mm.Categories: Devices for photolithography, Nanoimprint devices
Producer: EVGroup
EVG620NT/EVG6200NT Mask Alignment System (semi-automated / automated)
Production system for wafer sizes up to 150 mm / 200 mm Proximity wedge error compensationCategories: Devices for photolithography, Nanoimprint devices
Producer: EVGroup