VELION FIB-SEM instrument


FIB-centric nanofabrication

VELION is a novel FIB-SEM instrument in which FIB nanofabrication has matured into the standard technique for fabricating three dimensional and high resolution nanostructures, such as plasmonic devices, nano-fluidics, localized implantation and functionalization. 

With its unique set-up of a vertical FIB-column and attached SEM, in combination with Raith?s laser interferometer stage and mature lithography technology, VELION truly defines FIB as the priority technique. The dedicated nanofabrication system architecture ensures unrivaled stability, accuracy, and automation. Even the most complex structures can be fabricated with highest precision, completely unattended over many hours. 

The new VELION, with its innovative system set-up, offers:

– Direct and versatile FIB patterning for simplified, flexible, 3D, and automated processing

– Highest precision and reproducible nanofabrication over extended areas and periods of time

– SEM imaging for in-situ process control, inspection and sample preparation